TECHNOLOGY
European Technology covered by more than 30 Patents
EEMCO leverages EBNER GROUP’s 75+ years of furnace technology expertise to manufacture high-quality SiC growth furnaces. These furnaces allow us to produce high quality 150 and 200 mm SiC pucks.
To achieve the highest quality crystals, EEMCO integrates advanced furnace control systems. This includes a digital twin technology and Industry 5.0 integration, enabling real-time data analysis and closed-loop optimization of the growth process.
We utilize comprehensive defect analysis techniques. This combines, photoluminescence (PL) X-ray tomography (XRT) and KOH etching with assisted AI-powered quantification. This combination allows for a deeper understanding of crystal defects, leading to continuous improvement in crystal quality.
Our Commitment
Our vision is to produce with 100 % green energy at EEMCO, offering higher quality and competitive pricing. We commit to emphasize renewable energy use and raw material recycling.
MANUFACTURING PROCESS
From Raw Material to Puck
The SiC manufacturing process begins with high-quality SiC powder, sourced and recycled by EEMCO’s subsidiary, SiCreate. This powder is placed within a crucible inside a specialized furnace, developed and provided by EBNER.
Within the furnace, a seed crystal is introduced, and the SiC powder undergoes a process called Physical Vapor Transport (PVT). Under high temperatures, the SiC powder sublimates into a gas and redeposits onto the seed crystal, gradually forming a larger SiC crystal known as a boule.
Once the boule is grown, it is removed from the furnace. Its outer diameter is then ground and polished, and a „witness wafer“ is extracted for quality analysis. The boule is then sliced into thin discs called pucks using a multi-wire saw. These pucks are further processed and polished into SiC wafers, ready for use in manufacturing power electronics.
WHY EEMCO?
We are the independent, green and
ISO certified SiC producer in Europe
- R&D and pilot line in Austria, zero-emmission volume ramp-up planned in Norway
- Own dedicated process development for high-quality 150 and 200 mm seeds
- Comprehensive defect analysis using photoluminescence (PL), XRT, KOH, and AI-powered quantification
- Advanced and automated furnace digitalisation
- Close cooperation with different research partners in both academia and industry
- Leveraging 75+ years of EBNER expertise in furnace manufacturing and shared services
- Enhanced furnace technology and component reusability for a greener process